JPH0745955Y2 - 基板のディスクブラシ式洗浄装置 - Google Patents

基板のディスクブラシ式洗浄装置

Info

Publication number
JPH0745955Y2
JPH0745955Y2 JP9172390U JP9172390U JPH0745955Y2 JP H0745955 Y2 JPH0745955 Y2 JP H0745955Y2 JP 9172390 U JP9172390 U JP 9172390U JP 9172390 U JP9172390 U JP 9172390U JP H0745955 Y2 JPH0745955 Y2 JP H0745955Y2
Authority
JP
Japan
Prior art keywords
substrate
brush
disk
cleaning
cleaning liquid
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
JP9172390U
Other languages
English (en)
Japanese (ja)
Other versions
JPH0448619U (en]
Inventor
次雄 中村
昭夫 土屋
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Dainippon Screen Manufacturing Co Ltd
Original Assignee
Dainippon Screen Manufacturing Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Dainippon Screen Manufacturing Co Ltd filed Critical Dainippon Screen Manufacturing Co Ltd
Priority to JP9172390U priority Critical patent/JPH0745955Y2/ja
Publication of JPH0448619U publication Critical patent/JPH0448619U/ja
Application granted granted Critical
Publication of JPH0745955Y2 publication Critical patent/JPH0745955Y2/ja
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

Landscapes

  • Cleaning In General (AREA)
JP9172390U 1990-08-31 1990-08-31 基板のディスクブラシ式洗浄装置 Expired - Lifetime JPH0745955Y2 (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP9172390U JPH0745955Y2 (ja) 1990-08-31 1990-08-31 基板のディスクブラシ式洗浄装置

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP9172390U JPH0745955Y2 (ja) 1990-08-31 1990-08-31 基板のディスクブラシ式洗浄装置

Publications (2)

Publication Number Publication Date
JPH0448619U JPH0448619U (en]) 1992-04-24
JPH0745955Y2 true JPH0745955Y2 (ja) 1995-10-18

Family

ID=31827605

Family Applications (1)

Application Number Title Priority Date Filing Date
JP9172390U Expired - Lifetime JPH0745955Y2 (ja) 1990-08-31 1990-08-31 基板のディスクブラシ式洗浄装置

Country Status (1)

Country Link
JP (1) JPH0745955Y2 (en])

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US10685856B2 (en) 2017-03-09 2020-06-16 SCREEN Holdings Co., Ltd. Substrate processing method and substrate processing apparatus

Families Citing this family (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2006068706A (ja) * 2004-09-06 2006-03-16 Nihon Micro Coating Co Ltd パネルクリーニング装置及び方法
JP5764309B2 (ja) * 2010-09-30 2015-08-19 ＡｖａｎＳｔｒａｔｅ株式会社 シートガラスの製造方法

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US10685856B2 (en) 2017-03-09 2020-06-16 SCREEN Holdings Co., Ltd. Substrate processing method and substrate processing apparatus

Also Published As

Publication number Publication date
JPH0448619U (en]) 1992-04-24

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